品牌：JAC
應用領域：IC FAB
設備特點：
This is a higher throughput, upgraded version of the highly regarded, highly reliable platform with additional features not available on the original. JAC has a flexible system design to support immersion ArF lithography processes, including top-coat coating and removal. JAC immersion option package incorporates SOKUDO’s unique wafer clean and dry technology which is particularly useful in preventing defects in immersion process.
