芯片上的線型和點(diǎn)型：3 x 3mm2 結(jié)構(gòu)的深度在5和15 μm之間變化。
QRM QRM-MicroBar測試卡，QRM-MicroBar測試模體,Micro-CT高分辨率測試卡技術(shù)指標(biāo) 基礎(chǔ)材料： 固體塑料（切屑放在空氣中的支撐件上-壁厚> 0.3 mm） 直徑幻影： 5.2毫米 高度： 19毫米 硅芯片的措施： 3 x 3 x 0.66毫米 芯片上的結(jié)構(gòu)（分辨率）： 分別為1至10 μm。500至50 LP / mm 芯片材質(zhì)： 硅 圖案對(duì)比 硅/空氣
As a further development of our popular MicroCT-BarPattern-Phantom we now present the BarPattern-NANO!
The easy and convenient to use phantom provides two silicon chips, perpendicularly aligned and placed on a solid plastic support. Both 3 x 3 mm2 chips exhibit several line and point pattern representing lines and points of 1 to 10 μm width.
In addition a slented edge (L) and a Siemens-star (actinomorphic star) are also placed on the chip. The different structures on the chip are arranged in such a way over the chip, that spatial resolution can be determined in the center as well as in the peripheral regions of the image/chip with a single measurement.
Line- and Pointpattern on the chip: 3 x 3 mm2 The depth of the structures varies within 5 and 15 μm.
Specifications Base material: solid plastic (chips placed on support in air -> 0.3 mm wall thickness) Diameter Phantom: 5.2 mm Height: 19 mm measures of silicon chip: 3 x 3 x 0.66 mm structures on the chip (resolution): 1 to 10 μm, resp. 500 to 50 LP/mm Material of chip: silicon Contrast of pattern silicon / air
