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主要特點(diǎn)
該款設(shè)備是全自動(dòng)Plasma增強(qiáng)CVD系統(tǒng)(PECVD)，連續(xù)可控溫度以及Plasma強(qiáng)度等，配備真空系統(tǒng)，可以低壓條件下實(shí)現(xiàn)工藝，PECVD系統(tǒng)能使整個(gè)實(shí)驗(yàn)腔體都處于輝光產(chǎn)生區(qū)，輝光相對均勻等效，很好的解決了傳統(tǒng)等離子工作不穩(wěn)定狀態(tài)，該設(shè)備爐管可360°旋轉(zhuǎn)，有助于粉料的燒結(jié)更均勻，可大角度傾斜，方便進(jìn)出料，傾斜角度在0-35°之間，所有物料經(jīng)過的管道都選用非金屬材質(zhì)，如：進(jìn)出料腔體選用石英材質(zhì)，推料桿選用石英及聚四氟材質(zhì)。
The device is a fully automated Plasma Enhanced CVD System (PECVD) with continuous temperature control and Plasma strength. Equipped with a vacuum system that can be used under low pressure conditions. The PECVD system enables the entire experimental chamber to be in the glow generation area. The light is uniform and equivalent, which solves the unstable operation of the traditional plasma. The tube of the device can rotate 360°, which helps the sintering of the powder to be more uniform, can be inclined at a large angle, and is convenient for feeding and discharging. The inclination angle is Between 0-35°, all pipeline materials passing through are made of non-metallic materials. For example, the inlet and outlet chambers are made of quartz, and the push rods are made of quartz and PTFE.
技術(shù)參數(shù)
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加熱系統(tǒng)Heating system |
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功率Power |
4KW |
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電壓Voltage |
AC220V 50/60Hz |
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zui高溫度Max. Temp |
1200°C |
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使用溫度Working temp |
1100°C |
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加熱長度Heating zone length |
200mm+200mm |
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恒溫長度Constant zone length |
250mm |
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PID automatic control and auto-tune function. 模糊PID控制和自整定調(diào)節(jié) 30 programmable segments for precise thermal processing. 智能化30段可編程控制 Built-in protection for the over-heated and broken thermocouple. 超溫和斷偶報(bào)警功能 Operation interface is10 "LCD touch screen control 操作界面為10 "液晶觸摸屏控制 |
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控溫精度Temperature Accuracy |
+/- 1℃ |
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爐管尺寸Tube Size |
Size：Φ60*420+Φ100*360+Φ60*420mm 尺寸：Φ60*420+Φ100*360+Φ60*420mm Furnace tube rotation rate：0~60r/min 爐管轉(zhuǎn)速：0~60r/min |
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Furnace body inclination angle |
0~35°（adjustable） |
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Plasma系統(tǒng)Plasma system |
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本系統(tǒng)借助于輝光放電產(chǎn)生等離子體，輝光放電等離子體中，電子密度高，通過反應(yīng)氣態(tài)放電，有效利用了非平衡等離子體的反應(yīng)特征，從根本上改變了反應(yīng)體系的能量供給方式。 |
The system generates plasma by means of glow discharge. In the glow discharge plasma, the electron density is high, and the reaction characteristics of the non-equilibrium plasma are effectively utilized by the reaction gas discharge, which fundamentally changes the energy supply mode of the reaction system. |
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進(jìn)料系統(tǒng)Feeding system |
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送料系統(tǒng)速度連續(xù)可調(diào)，停止送料且爐體傾斜zui大時(shí)，物料不會(huì)從送料系統(tǒng)外漏，送料系統(tǒng)方便拆卸，拆卸后可手動(dòng)加料，設(shè)備可正常運(yùn)行。 |
The speed is continuously adjustable. When the feeding is stopped and the furnace body is tilted to the maximum, the material will not leak . The feeding system is easy to disassemble, and the material can be manually fed after disassembly, and the equipment can operate normally. |
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出料系統(tǒng)Discharge system |
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出料系統(tǒng)在爐體傾斜出料時(shí)可自動(dòng)出料。） |
The discharging system can automatically discharge when the furnace body is inclined and discharged. |
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氣體控制系統(tǒng)Gas control system |
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該控氣系統(tǒng)是可以控制兩種氣體按照不同流量進(jìn)行混合配比的，也可以獨(dú)立控制，質(zhì)量流量計(jì)安裝于密封的可移動(dòng)的機(jī)柜內(nèi)，由超潔雙拋不銹鋼管與精密雙卡套接頭連接組成。 |
The gas control system can control the mixing ratio of the two gases according to different flow rates, and can also be independently controlled. The mass flow meter is installed in a sealed movable cabinet, which is composed of super clean stainless steel tube and the precision double ferrule joint.
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低真空系統(tǒng)Low vacuum system |
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該系統(tǒng)配備真空機(jī)械泵，可以抽真空，可以讓設(shè)備在真空環(huán)境下進(jìn)行反應(yīng)。
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Equipped with a vacuum mechanical pump that can be vacuumed to allow the unit to react in a vacuum environment. |
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氣料分離系統(tǒng)Separation system |
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該系統(tǒng)可以讓設(shè)備在充氣體保護(hù)或者抽真空時(shí)，實(shí)現(xiàn)氣體與物料的分離。 |
the system allows the separation of gas and material during the protection of the inflator or when vacuuming.
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過濾系統(tǒng)filtering system |
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該系統(tǒng)可防止物料進(jìn)入真空泵，保證真空泵的正常運(yùn)行。 |
The system prevents material from entering the vacuum pump and ensures proper operation of the vacuum pump. |
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爐管轉(zhuǎn)動(dòng)系統(tǒng)Furnace tube rotation system |
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爐管轉(zhuǎn)動(dòng)系統(tǒng)可以讓爐管360°勻速轉(zhuǎn)動(dòng)，轉(zhuǎn)速在0-60r/min連續(xù)可調(diào)，且能在60r/min轉(zhuǎn)速下長時(shí)間運(yùn)行。 |
Allows the tube to rotate 360° at a constant speed. The rotation speed is continuously adjustable from 0 to 60 r/min for a long time. |
